Equipment list reflects the current investment plan and other facilities available through the collaboration within the department. Donations for the equipments on the wish list (highlighted in purple) will be appreciated.
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Exploratory Electronic Hybrid Device Lab(EXEL)
Drag from side to side.
| NO | EQUIPMENTS | SET-UP BY | PROJECTS |
|---|---|---|---|
| 1 | Raman Spectrometer (514nm, 50mW, 1um-250um spot, areal/line mapping) | Installed | Graphene analysis |
| 2 | 1 RF/ 2 DC 4” PVD system (3 targets) | Installed | Graphene process |
| 3 | Laser annealing system | Installed | Graphene process |
| 4 | Clean work bench (Class – 100) | Installed | Graphene process |
| 5 | Chemical hood | Installed | Graphene process |
| 6 | Chemical spin sprayer | Installed | Graphene process |
| 7 | Clean booth | Installed | Wet cleanning process |
| 8 | Plasma Asher | Installed | Graphene etch |
| 9 | Contact aligner | Installed | Device patterning |
| 10 | Stamping equipment | Available in dept | Graphene process |
| 11 | D.I. Generator | Installed | Device Fabrication |
| 12 | Clean room conversion for the lab | Installed | Device Fabrication |
| 13 | Optical microscope system | Installed | Device Fabrication |
| 14 | E-beam evaporator | Installed | Metal contact |
| 15 | Rapid thermal annealing system | Installed | Thermal annealing process |
| 16 | Plasma etcher | Available in dept | Device Fabrication |
| 17 | Atomic layer deposition | Installed | Device Fabrication |
| 18 | Critical point dryer | Installed | Device Fabrication |
| 19 | Film thickness measurement | TBM, 2012 | Device Fabrication |
| 20 | EM Shield test room | Installed | RF, Noise test |
| 21 | 100mm Electrical/optical prober on anti vibration table | Installed | Semiconductor device test |
| 22 | Parameter analyzer (Keithley 4200) – HV | Installed | Semiconductor device test |
| 23 | Parameter analyzer (Keithley 4200) – LC | Installed | Semiconductor device test |
| 24 | Parameter analyzer (Agilent 4156C) | Installed | Semiconductor device test |
| 25 | Impedance analyzer (4294A) – HV | Installed | Semiconductor device test |
| 26 | Impedance analyzer (4294A) – LC | Installed | Semiconductor device test |
| 27 | Pulse generator (81110A) | Installed | Semiconductor device test |
| 28 | Pulse generator (81150A) | Installed | Semiconductor device test |
| 29 | 3000mm manual probe station(-50C to 200C, Leakage 50fA, ambient control with pseudo vacuum) (MSTECH 12000C) | Installed | Reliability, nano device test |
| 30 | Digital oscilloscope (DSO7104, 1GHz) | Installed | Semiconductor device test |
| 31 | Internal photo emission system | Installed | Semiconductor device test |
| 32 | Signal Analyzer (35670A)+Current amplifier (SR 350) | Installed | Noise test for bio sensor |
| 33 | Electrometer (Keithley 6517B) | Installed | Internal Photo Emission |
| 34 | Nano voltmeter/Nano Ammeter (6220-2182A) | Installed | General electrical test |
| 35 | Pico ammeter/ Voltage Source (6487) | Installed | General electrical test |
| 36 | Dual-channel pico ammeter (2502) | Installed | Optoelectronic device test |
| 37 | Cryogenic tester for a packaged device | Available in dept | General electrical test |
| 38 | 300mm semi-auto probe station | Installed | Reliability physics study |
| 39 | Cryogenic RF probe station(2″ or above) | Installed | Reliability physics study |
| 40 | Vector network analyzer | TBD | RF Test |
| 41 | Agilent parameter analyzer(1500) | Available in dept | General electrical test |
