Incipient amorphous-to-crystalline transition in HfO2 as a function of thickness scaling and anneal temperature
Journal
Journal of Non-Crystalline Solids
Vol
354
Page
p.399-403
Author
P.S. Lysaght, J.C. Woicik, M. A. Sahiner, B.H. Lee and R. Jammy
Year
2008
Date
2007.10.26
doi
http://doi.org/10.1016/j.jnoncrysol.2007.07.050
File
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