Simultaneous measurement of six layers in a silicon on insulator film stack using spectrophotometry and beam profile reflectometry
- Journal
- Journal of Applied Physics
- Vol
- 81 (8)
- Page
- 3570
- Year
- 1997
- File
- 1997_JAP_J.M.Leng 1.pdf (553.9K) 1회 다운로드 DATE : 2021-04-01 14:46:59
- Link
- https://doi.org/10.1063/1.364994 137회 연결