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    • Simultaneous measurement of six layers in a silicon on insulator film stack using spectrophotometry and beam profile reflectometry
    Journal
    Journal of Applied Physics
    Vol
    81 (8)
    Page
    3570
    Author
    J. M. Leng, J. J. Sidorowich, Y. D. Yoon, J. Opsal, B. H. Lee
    Year
    1997
    Date
    1997.04.15
    doi
    https://doi.org/10.1063/1.364994
    File
    1997_JAP_J.M.Leng 1.pdf (553.9K) 1회 다운로드 DATE : 2021-04-01 14:46:59