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    • Modulation of TiSiN effective work function using high-pressure postmetallization annealing in dilute oxygen ambient
    Journal
    Appl. Phys. Lett.
    Vol
    92
    Page
    263505
    Author
    J.M. Lee, H.K. Park, M. Hasan, M. Jo, M. Chang, B. H. Lee, C.S. Park, C.Y. Kang and H. Hwang
    Year
    2008
    Date
    2008.07.03
    doi
    http://doi.org/10.1063/1.2953192
    File
    2008_APL_JMLEE.pdf (648.0K) 0회 다운로드 DATE : 2021-04-01 14:57:16