Modulation of TiSiN effective work function using high-pressure postmetallization annealing in dilute oxygen ambient
- Journal
- Appl. Phys. Lett.
- Vol
- 92
- Page
- 263505
- Year
- 2008
- File
- 2008_APL_JMLEE.pdf (648.0K) 0회 다운로드 DATE : 2021-04-01 14:57:16
- Link
- http://doi.org/10.1063/1.2953192 257회 연결