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Conduction Mechanism and Reliability Characteristics of a Metal–Insulator–Metal Capacitor with Single ZrO2 Layer

Journal

Jpn. J. of Appl. Phys.

Vol

50(4), Part 2

Page

04DD02

Author

H.M. Kwon, I.S. Han, S.U.Park, J.D.Bok, Y.J. Jung, H.S. Shin, C.Y. Kang, B.H. Lee, R. Jammy, H.D. Lee

Year

2011

Date

2011.04.20

doi

DOI: 10.1143/JJAP.50.04DD02

File

2011_JJAP_HMKWON.pdf (540.9K) 0회 다운로드 DATE : 2021-03-30 17:26:09

Link

http://DOI: 10.1143/JJAP.50.04DD02 95회 연결