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    • Effect of Pre-Existing Defects on Reliability Assessment of High-K Gate Dielectrics
    Journal
    Microelectronics reliability
    Vol
    44
    Page
    1509-1512
    Author
    G.Bersuker, J.H.Sim, C.D.Young, R.Choi, P.M.Zeitzoff, G.A.Brown, B. H. Lee, R.W.Murto
    Year
    2004
    Date
    2004.09.17
    doi
    https://doi.org/10.1016/j.microrel.2004.07.048
    File
    2004_MR_GBERSUKER.pdf (775.9K) 0회 다운로드 DATE : 2021-04-01 15:52:04