Interfacial Layer-Induced Mobility Degradation in High-k Transistors
Journal
Japanese Journal of Applied Physics
Vol
43 (11S)
Page
7899
Author
G. Bersuker, J. Barnett, N. Moumen, S. Stemmer, M. Agustin, B. Foran, C. D. Young, P. Lysaght, B. H. Lee, Peter M. Zeitzoff, and H. R. Huff
Year
2004
Date
2004.11.15
doi
https://doi.org/10.1143/JJAP.43.7899
File
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