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A Correlation Between Oxygen Vacancies and Reliability Characterisitcs in a Single Zirconium Oxide Metal-Insulator-Metal Capacitor

Journal

IEEE Trans. Elect. Dev.

Vol

61(8)

Page

p.2619

Author

M.H.Kwon, S .K.Kwon, W.I.Choi, C.Y.Kang, B.H.Lee, P.Kirsch, H.D.Lee *

Year

2014

Date

2014.07.14

doi

https://doi.org/10.1109/TED.2014.2326423

File

2014_TED_HKWON.pdf (4.1M) 0회 다운로드 DATE : 2021-04-01 16:47:31

Link

https://doi.org/10.1109/TED.2014.2326423 104회 연결