Evaluation of tantalum silicon alloy system as gate electrodes
Journal
APPLIED PHYSICS LETTERS
Vol
87
Page
212110
Author
H. Luan, H. N. Alshareef, P. S. Lysaght, H. R. Harris, H. C. Wen, K. Choi, Y. Senzaki, P. Majhi and B. H. Lee
Year
2005
Date
2005.11.18
doi
https://doi.org/10.1063/1.2126132
File
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