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    • Leakage current limit of time domain reflectometry in ultra-thin dielectric characterization
    Journal
    Jpn. J. of Appl. Phys.
    Vol
    53
    Page
    08LC02
    Author
    Y.H.Kim, S.H.Baek, C.H.Jeon, Y.G.Lee, J.J.Kim, U.J.Jung, S.C.Kang, W.Park, S.H.Lee, B.H.Lee*
    Year
    2014
    Date
    2014.07.09
    doi
    https://doi.org/10.7567/JJAP.53.08LC02
    File
    2014_JJAP_YHKIM.pdf (3.8M) 2회 다운로드 DATE : 2021-04-01 16:51:36