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    • Morphology and Crystallization of Ultra Thin HfON (EOT≤1nm) with TiN Metal Gate: Impact on Electron Mobility
    Journal
    Electrochem. Solid-State Lett.
    Vol
    9
    Page
    G77
    Author
    S.C. Song, J. Sim, Z. Zhang, S. Bae, P. Kirsch, G. Bersuker, and B. H. Lee
    Year
    2006
    Date
    2006.01.09
    doi
    https://doi.org/10.1149/1.2161441
    File
    2006_ECS_S.C.Song.pdf (380.4K) 0회 다운로드 DATE : 2021-04-01 21:05:56