Enhanced Reliability and Performance of High-k MOSFET by Two-Step Annealing
Journal
Electrochem. Solid-State Lett.
Vol
9(4)
Page
G127
Author
M. S. Rahman, H. Park, M. Chang, D. Lee, B. H. Lee and H. Hwang
Year
2006
Date
2006.02.14
doi
https://doi.org/10.1149/1.2168287
File
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