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Composition dependence of the work function of Ta1-xAlxNy Metal Gates

Journal

Appl. Phys. Lett.

Vol

88

Page

072108

Author

H.N. Alshareef, K. Choi, H.C. Wen, H. F. Luan, H.R. Harris, Y. Senzaki, P. Majhi, B. H. Lee, R.Jammy, S. Aguirre-Tostado, B. E. Gnade, and R. M. Wallace

Year

2006

Date

2006.02.16

doi

https://doi.org/10.1063/1.2174836

File

2006_APL_H.N.Alshareef-1.pdf (474.1K) 0회 다운로드 DATE : 2021-04-01 21:13:18

Link

https://doi.org/10.1063/1.2174836 202회 연결