Developing a systematic approach to metal gates and high-k dielectrics in future-generation CMOS
Journal
MICRO
Vol
24(4)
Page
25-31
Author
P. Majhi, HC. Wen, H.N. Alshareef, H.R. Harris, H. Luan, K.Choi, C.S. Park, S.C. Song, B. H. Lee and R. Jammy
Year
2006