Analysis of trap effect on reliability using the charge pumping technology in La-incorporated high-k dielectrics
Journal
Microelectronics Engineering
Vol
88
Page
3415-3418
Author
H.M. Kwon, W.H. Choi, I.S. Han, S.U. Park, B.S. Park, Y.Y. Zhang, C.Y. Kang, B.H.Lee, R. Jammy, H.D.Lee
Year
2011
Date
2011.12
doi
https://doi.org/10.1016/j.mee.2010.06.007
File
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