Metal gate Work Function Engineering Using AlNx Interfacial Layers
- Journal
- Appl. Phys. Lett.
- Vol
- 88(11)
- Page
- 111124
- Year
- 2006
- File
- 2006_APL_H.N.Alshareef..pdf (505.7K) 0회 다운로드 DATE : 2021-04-01 21:35:23
- Link
- https://doi.org/10.1063/1.2186517 182회 연결