Metal gate Work Function Engineering Using AlNx Interfacial Layers
Journal
Appl. Phys. Lett.
Vol
88(11)
Page
111124
Author
H.N. Alshareef, H. F. Luan, K. Choi, H.C. Wen, H.R. Harris, Y. Senzaki, P. Majhi and B. H. Lee
Year
2006
Date
2006.03.16
doi
https://doi.org/10.1063/1.2186517
File
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