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Metal gate Work Function Engineering Using AlNx Interfacial Layers

Journal

Appl. Phys. Lett.

Vol

88(11)

Page

111124

Author

H.N. Alshareef, H. F. Luan, K. Choi, H.C. Wen, H.R. Harris, Y. Senzaki, P. Majhi and B. H. Lee

Year

2006

Date

2006.03.16

doi

https://doi.org/10.1063/1.2186517

File

2006_APL_H.N.Alshareef..pdf (505.7K) 0회 다운로드 DATE : 2021-04-01 21:35:23

Link

https://doi.org/10.1063/1.2186517 613회 연결