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    • Evaluation of titanium silicon nitride as gate electrodes for complimentary metal-oxide semicondiuctor
    Journal
    Appl. Phys. Lett.
    Vol
    88(14)
    Page
    142113
    Author
    H. Luan, H. N. Alshareef, H. R. Harris, H. C. Wen, K. Choi, Y. Senzaki, P. Majhi and B. H. Lee
    Year
    2006
    Date
    2006.04.07
    doi
    https://doi.org/10.1063/1.2188380
    File
    2006_APL_H.Luan.pdf (305.3K) 0회 다운로드 DATE : 2021-04-01 21:36:27