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Gate Stack Technology for Nano Scale Devices: Current and Future Challenges

Journal

Materials Today

Vol

9(6)

Page

32

Author

B.H. Lee, J.W. Oh, H.H. Tseng, R. Jammy and H. Huff

Year

2006

Date

2006.05.31

doi

https://doi.org/10.1016/S1369-7021(06)71541-3

File

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Link

https://doi.org/10.1016/S1369-7021(06)71541-3 983회 연결