A comparative study of depth profiling of interface states using charge pumping and low frequency noise measurement in SiO2/HfO2 gate stack nMOSFETs
Journal
Microelectronics Engineering
Vol
88
Page
p.3411
Author
K.T.Lee, C.Y.Kang, H.S.Choi, S.H.Hong, G.B.Choi, J.C.Kim, S.H.Song, R.H.Baek, M.S.Park, H.C. Sagong, B.H.Lee, G.Bersuker, H.H.Tseng, R.Jammy, Y.H.Jeong
Year
2011
Date
2011.12
doi
https://doi.org/10.1016/j.mee.2009.08.002
File
2011-ME-KTLEE.pdf (1.1M) 0회 다운로드 DATE : 2021-03-30 21:13:41