포항공대 EESL Fearless challenge

Effective Work Function Modulation of atomic-layer-deposition-TaN film by capping layer

Journal

Appl. Phys. Lett.

Vol

89

Page

032113

Author

K .Choi, H.N. Alshareef, H.C. Wen, R.Harris, H.Luan, Y. Senzaki, P. Lysaght, P. Majhi and B. H. Lee

Year

2006

Date

2006.07.21

doi

https://doi.org/10.1063/1.2234288

File

2006_APL_KCHOI.pdf (390.4K) 0회 다운로드 DATE : 2021-04-01 21:50:27

Link

https://doi.org/10.1063/1.2234288 169회 연결