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Combinatorial Study of Ni-Ti-Pt Ternary Metal Gate Electrodes on HfO2 for the Advanced Gate Stack

Journal

Appl. Phys. Lett.

Vol

89(14)

Page

142108

Author

K.S.Chang, M. Green , J. Suehle , E. Vogel , H. Xiong , J. Hattrick-Simpers , I. Takeuchi , O. Famodu , K. Ohmori, P. Ahmet , T. Chikyow , P. Majhi , B. H. Lee and M. Gardner

Year

2006

Date

2006.10.04

doi

https://doi.org/10.1063/1.2357011

File

2006_APL_K.S.Chang.pdf (711.6K) 0회 다운로드 DATE : 2021-04-01 22:06:19

Link

https://doi.org/10.1063/1.2357011 196회 연결