Temperature dependence of the work function of ruthenium-based gate electrodes
Journal
Thin Solid Films
Vol
515(4)
Page
1294-1298
Author
H.N. Alshareef, H.C.Wen, H.F. Luan, K. Choi, H.R. Harris, Y. Senzaki, P. Majhi, B. H. Lee, B.Foran, G. Lian
Year
2006
Date
2006.12
doi
https://doi.org/10.1016/j.tsf.2006.03.026
File
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