Performance and reliability analysis of p-type metal-oxide-semiconductor field effect transistors with various combinations of Ru and Al gate metal
Journal
J. Vac. Sci. Technol.
Vol
28(6)
Page
1267
Author
H.B. Park, C.S.Park, C.Y. Kang, S.-C. Song, B.H. Lee, T.W. Kim, T.-Y. Jang, D.-H. Kim, J. K. Jeong, and Ri. Choi
Year
2010
Date
2010.11.11
doi
https://doi.org/10.1116/1.3514103
File
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