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    • Hot carrier degradation in HfSiON∕TiN fin shaped field effect transistor with different substrate orientations
    Journal
    J. Vac. Sci. Technol. B
    Vol
    27 (1)
    Page
    468
    Author
    C.D. Young, J.W. Yang, K. Matthews, S. Suthram, M.M. Hussain, G. Bersuker, C. Smith, R. Harris, R. Choi, B.H. Lee, H.H. Tseng
    Year
    2009
    Date
    2009.02.09
    doi
    http://doi.org/10.1116/1.3072919
    File
    2009_JVSTB_CDYOUNG.pdf (703.9K) 0회 다운로드 DATE : 2021-04-02 16:48:38