“Smart” TDDB algorithm for investigating degradation in high-κ gate dielectric stacks under constant voltage stress
Journal
Microelectronic Engineering
Vol
86 (3)
Page
287-290
Author
C.D. Young, G. Bersuker, J. Tun, R.Choi, D. Heh, B.H. Lee
Year
2009
Date
2009.03
doi
http://doi.org/10.1016/j.mee.2008.09.024
File
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