Effect of Si capping layer on the interface quality and NBTI of high mobility channel Ge-on-Si pMOSFETs
Journal
Microelectronic Engineering
Vol
86 (3)
Page
259-262
Author
O.S. Yoo, J. Oh, K.S. Min, C.Y. Kang, B.H. Lee, K.T. Lee, M.K. Na, H.-M. Kwon, P. Majhi, H-H Tseng, R. Jammy, J.S. Wang, H.-D. Lee
Year
2009
Date
2009.03
doi
http://doi.org/10.1016/j.mee.2008.04.024
File
2009_ME_OSYOO.pdf (319.3K) 0회 다운로드 DATE : 2021-04-02 17:12:46