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    • Stress field analysis to understand the breakdown characteristics of stacked high-k dielectrics
    Journal
    Appl. Phys. Lett.
    Vol
    94 (16)
    Page
    162904
    Author
    B.H. Lee, C. Kang, R. Choi, H-D. Lee, G. Bersuker
    Year
    2009
    Date
    2009.04.23
    doi
    http://doi.org/10.1063/1.3122924
    File
    2009_APL_BHLEE.pdf (97.5K) 0회 다운로드 DATE : 2021-04-02 17:15:22