Reliability Characteristics of La-doped High-k/Metal Gate nMOSFETs
Journal
Journal of Semiconductor Technology and Science
Vol
9 (3)
Page
166-173
Author
C.Y. Kang, R. Choi, B.H. Lee, R. Jammy
Year
2009
Date
2009.12
doi
http://doi.org/10.5573/JSTS.2009.9.3.166
File
2009_STS_CYKANG.pdf (3.9M) 0회 다운로드 DATE : 2021-04-02 17:24:22