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    • Effects of Multi-Layer Graphene Capping on Cu interconnects
    Journal
    Nanotechnology
    Vol
    24
    Page
    115707
    Author
    C.G.Kang, S.K.Lim, S.C.Lee, S.K.Lee,C.Cho, Y.G.Lee, H.J.Hwang, Y.H. Kim, H.J.Choi, S.H.Choe, M.H.Ham and B.H.Lee*
    Year
    2013
    Date
    2013.03.01 Also selected as article of particular interest.
    doi
    http://dx.doi.org/10.1088/0957-4484/24/11/115707
    File
    2013-Namotech-CGKANG.pdf (919.0K) 4회 다운로드 DATE : 2021-03-30 22:01:03