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Capacitance Analysis of Highly Leaky Al2O3 MIM Capacitors Using Time Domain Reflectometry

Journal

IEEE Electron Device Letters

Vol

33 (9)

Page

1303-1305

Author

Y. Kim, Y.G. Lee, M. Kim, C.G. Kang, U. Jung, J.J. Kim, S.C. Song, J. Blatchford, B. Kirkpatrick, H. Niimi, K.Y. Lim, B.H. Lee

Year

2012

Date

2012.09

doi

http://doi.org/10.1109/LED.2012.2205213

File

2012-EDL-YHKIM.pdf (246.7K) 0회 다운로드 DATE : 2021-04-02 17:42:30

Link

http://doi.org/10.1109/LED.2012.2205213 166회 연결