포항공대 EESL Fearless challenge

Pulsed KrF laser-assisted direct deposition of graphitic capping layer for Cu interconnect

Journal

Carbon

Vol

123

Page

307-310

Author

C. Cho, S.K. Lee, T.J. Yoo, S.W. Heo, H.J. Hwang, C.G. Kang, M.H. Ham, B.H. Lee

Year

2017

Date

2017.10

doi

http://doi.org/10.1016/j.carbon.2017.07.075

File

2017-Carbon-CCho.pdf (1.2M) 2회 다운로드 DATE : 2021-04-02 18:01:12

Link

http://doi.org/10.1016/j.carbon.2017.07.075 212회 연결