Quantitative Analysis of Deuterium Annealing Effect on Poly-Si TFTs by Low Frequency Noise and DC I-V Characterization
Journal
IEEE Trans. on Electron Device
Vol
65(4)
Page
p.1640
Author
D.H.Kim, S.K.Lim, B.Y.Bae, C.K.Kim, S.W.Lee, M.S.Seo, S.Y.Kim, K.M.Hwang, G.B.Lee, B.H. Lee. Y.G.Choi
Year
2018
Date
2018.03.01
doi
http://doi.org/10.1109/TED.2018.2805316
File
2018-TED-KAIST.pdf (1.8M) 1회 다운로드 DATE : 2021-03-31 15:13:05