Mechanism of electron trapping and characteristics of traps in HfO2 gate stacks
Journal
IEEE Transactions on Device and Materials Reliability
Vol
7 (1)
Page
p.138-145
Author
G.Bersuker, J.H.Sim, C.S.Park, C.D.Young, S.V.Nadkarni, R.Choi and B. H. Lee
Year
2007
Date
2007.07.16
doi
http://doi.org/10.1109/TDMR.2007.897532
File
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