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Effects of Gate Edge Profile On Off-state Leakage Suppression in Metal Gate/High-k Dielectric Metal-Oxide-Semiconductor Field Effect Transistors

Journal

Appl. Phys. Lett.

Vol

90

Page

183501

Author

C.Y. Kang, R. Choi, S.C. Song and B. H. Lee

Year

2007

Date

2007.04.30

doi

http://doi.org/10.1063/1.2734381

File

2007_APL_CYKANG.pdf (783.9K) 0회 다운로드 DATE : 2021-04-01 13:26:28

Link

http://doi.org/10.1063/1.2734381 141회 연결