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    • Determination of Strain in the Silicon Channel Induced by a Metal Electrode
    Journal
    Microscopy and Microanalysis
    Vol
    13 (Suppl. 2)
    Page
    p.838-839
    Author
    H.C. Floresca, J. Wang, M. Kim, J. Kim, C.Y. Kang, R. Choi, S.C. Song, H.H. Tseng, B. H. Lee, R. Jammy
    Year
    2007
    Date
    2007.08.05
    doi
    http://doi.org/10.1017/S143192760707465X
    File
    2007_MMS_HCFLORESCA.pdf (583.9K) 0회 다운로드 DATE : 2021-04-01 13:47:34