Higher Permittivity Rare Earth Doped Hafnium Oxide for sub-45nm Metal-Insulator-Semiconductor Device Applications
Journal
Appl. Phys. Lett.
Vol
91
Page
062906
Author
S. Govindarajan, T. S. Böscke, P. Sivasubramani, U. Schröder, S. Ramanathan, P.D. Kirsch,B. E. Gnade, B. H. Lee, H.-H. Tseng, R. Jammy
Year
2007
Date
2007.08.07
doi
http://doi.org/10.1063/1.2768002
File
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