Higher Permittivity Rare Earth Doped Hafnium Oxide for sub-45nm Metal-Insulator-Semiconductor Device Applications
- Journal
- Appl. Phys. Lett.
- Vol
- 91
- Page
- 062906
- Year
- 2007
- File
- 2007_APL_SGOVINDARAJAN.pdf (444.5K) 0회 다운로드 DATE : 2021-04-01 13:49:38
- Link
- http://doi.org/10.1063/1.2768002 116회 연결