포항공대 EESL Fearless challenge

Frequency dependent capacitance due to the stress polarity dependent defects in Metal/high- dielectric/Metal capacitor

Conference

48th IEEE Semiconductor Interface Specialists Conference (SISC)

Author

S. C. Kang, S. K. Lee, J. Noh, S. Heo, S. M. Kim, S. K. Lim, and B. H. Lee

Year

2017

Date

2017

학회구분

International

File

2017_SISC_KSC.pdf (691.9K) 1회 다운로드 DATE : 2021-04-02 14:55:26