Early Detection of Random High-k Dielectric Failure using Laser-Induced Leakage-Current Mapping
- Conference
- IEEE International Reliability Physics Symposium (IRPS)
- Author
- J.Y.Hong, J.M. Jo, C.B.Lee, S.M.Kim, C.H.Ahn, H.J. Im, B.H. Lee
- Year
- 2026
- Date
- 2026
- 학회구분
-
International
