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Total 329건
9 페이지
게시판 검색
2008
89
B.H.Lee, S.C.Song, R.Choi and P.Kirsch,
"Metal Electrode/High-k Dielectric Gate Stack Technology for Power Management"
IEEE Transactions on Electron Devices
,
55 (1),
p.8-20,
2007.12.26 (invited).
http://doi.org/10.1109/TED.2007.911044.
2007
88
B. H. Lee, C.Y.Kang, S. Krishnan, P.Kirsch, D. Heh, C. Young, J.W. Yang, G. Bersuker, R.Choi, H.D.Lee,
"Electric-field-driven dielectric breakdown of metal-insulator-metal hafnium silicate"
Appl. Phys. Lett.
,
91,
243514,
2007.12.14.
http://doi.org/10.1063/1.2825288.
87
P. Lysaght, J.C. Woicik , M. Sahiner, B. H. Lee, R. Jammy,
"Characterizing crystalline polymorph transitions in HfO2 by extended x-ray absorption fine-structure spectroscopy"
Appl. Phys. Lett.
,
91,
122910,
2007.09.19.
http://doi.org/10.1063/1.2789180.
86
S. C. Song, M. M.Hussain, C. Burham, C. S. Park, B. H. Lee, and R. Jammy,
"Strain-enhanced scaling of HK+MG CMOSFETs"
Solid State Technology
,
50 (9),
p.46-49,
2007.09.
85
H. Park, R. Choi, B.H. Lee, and H. Hwang,
"Improved Hot Carrier Reliability Characteristics of Metal Oxide Semiconductor Field Effect Transistors with High-k Gate Dielectric by Using High Pressure Deuterium Post Metallization Annealing"
Jpn. J. Appl. Phys.
,
46 (33),
p.786-788,
2007.08.17.
http://doi.org/10.1143/JJAP.46.L786.
84
T. Boscke, S. Govindarajan , P.D. Kirsch , P.Y. Hung , C. Krug , B. H. Lee, J. Heitmann , U. Schroeder , G. Pant , B.E. Gnade , W.H. Krautschneider,
"Stabilization of Higher-k Tetragonal HfO2 by SiO2 Admixture Enabling Thermally Stable Metal Insulator Metal Capacitors"
Appl. Phys. Lett.
,
91,
072902,
2007.08.14.
http://doi.org/10.1063/1.2771376.
83
S. Govindarajan, T. S. Böscke, P. Sivasubramani, U. Schröder, S. Ramanathan, P.D. Kirsch,B. E. Gnade, B. H. Lee, H.-H. Tseng, R. Jammy,
"Higher Permittivity Rare Earth Doped Hafnium Oxide for sub-45nm Metal-Insulator-Semiconductor Device Applications"
Appl. Phys. Lett.
,
91,
062906,
2007.08.07.
http://doi.org/10.1063/1.2768002.
82
H.C. Floresca, J. Wang, M. Kim, J. Kim, C.Y. Kang, R. Choi, S.C. Song, H.H. Tseng, B. H. Lee, R. Jammy,
"Determination of Strain in the Silicon Channel Induced by a Metal Electrode"
Microscopy and Microanalysis
,
13 (Suppl. 2),
p.838-839,
2007.08.05.
http://doi.org/10.1017/S143192760707465X.
81
C.Y. Kang, R. Choi, M. Hussain, J. Wang, Y.J. Suh, H. Floresca, M. Kim, J. Kim, B. H. Lee, R. Jammy,
"Effects of Metal Gate-Induced Strain on the Performance of Metal-Oxide-Semiconductor Field Effect Transistors with Titanium Nitride Gate Electrode and Hafnium Oxide Dielectric"
Appl. Phys. Lett.
,
91,
033511,
2007.07.19.
http://doi.org/10.1063/1.2766667.
80
Y. Wang, K. P. Cheung, R. Choi, G. A. Brown, B. H. Lee,
"Error and correction in capacitance-voltage measurement due to the presence of source and drain"
IEEE Electron Device Letters
,
28 (7),
p. 640-642,
2007.06.25.
http://doi.org/10.1109/LED.2007.899602.
79
C.D.Young, D. Heh, A. Neugroschel, R.Choi, B.H.Lee, G.Bersuker,
"Electrical characterization and analysis technique for high-k era"
Microelectronics Reliability
,
47,
p.479-488,
2007.04.09.
http://doi.org/10.1016/j.microrel.2007.01.053.
78
C.Y. Kang, R. Choi, S.C. Song and B. H. Lee,
"Effects of Gate Edge Profile On Off-state Leakage Suppression in Metal Gate/High-k Dielectric Metal-Oxide-Semiconductor Field Effect Transistors"
Appl. Phys. Lett.
,
90,
183501,
2007.04.30.
http://doi.org/10.1063/1.2734381.
77
S. Joshi, C. Krug, D. heh, H.J. Na, H.R. Harris, J.W, Oh, P.D. Kirsch, P. Majhi, B. H. Lee, H.H. Tseng, R. Jammy, J.C. Lee, S.K. Banerjee,
"Improved Ge Surface Passivation With Ultrathin SiOx Enabling High-Mobility Surface Channel pMOSFETs Featuring a HfSiO/WN Gate Stack"
IEEE Electron Device Letters
,
28 (4),
p.308-311,
2007.04.02.
http://doi.org/10.1109/LED.2007.893274.
76
Y. Wang, K. P. Cheung, R. Choi, G. A. Brown, B. H. Lee,
"Accurate series resistance extraction from capacitor using Time-Domain-Reflectometry"
IEEE Electron Device Letters
,
28 (4),
p.279-281,
2007.03.26.
http://doi.org/10.1109/LED.2007.891751.
75
G.Bersuker, J.H.Sim, C.S.Park, C.D.Young, S.V.Nadkarni, R.Choi and B. H. Lee,
"Mechanism of electron trapping and characteristics of traps in HfO2 gate stacks"
IEEE Transactions on Device and Materials Reliability
,
7 (1),
p.138-145,
2007.07.16.
http://doi.org/10.1109/TDMR.2007.897532.
74
Y. Wang, K. P. Cheung, R. Choi, G. A. Brown, B. H. Lee,
"Time Domain Reflectometry for capacitance-voltage measurement with very high leakage current"
IEEE Electron Device Letters
,
28 (1),
p.51-53,
2006.12.26.
http://doi.org/10.1109/LED.2006.887628.
73
M. Chang, M. Jo, H. Park, H. Hwang, B. H. Lee, and R.Choi,
"Effect of F2 Postmetallization Annealing on the Electrical and Reliability Characteristics of HfSiO Gate Dielectric"
IEEE Elec. Dev. Lett.
,
28 (1),
p.21-23,
2006.12.26.
https://doi.org/10.1109/LED.2006.887941.
72
O. Sharia, A.Demkov, G.Bersuker, B. H. Lee,
"Theoretical study of the insulator/insulator interface: Band alignment at the SiO2/HfO2 junction"
Phys. Rev. B
,
75,
035306,
2007.01.05.
https://doi.org/10.1103/PhysRevB.75.035306.
2006
71
P.Kirsch, M.A.Quevedo-Lopez, S.A.Krishnan, G.Pant, M.J.Kim, R.M.Wallace, B.E.Gande, and B. H. Lee,
"Mobility and Charge Trapping Comparison for Crystalline and Amorphous HfON and HfSiON Gate Dielectrics"
Appl. Phys. Lett.
,
89(24),
242909,
2006.12.13.
https://doi.org/10.1063/1.2392992.
70
H.N. Alshareef, H.C.Wen, H.F. Luan, K. Choi, H.R. Harris, Y. Senzaki, P. Majhi, B. H. Lee, B.Foran, G. Lian,
"Temperature dependence of the work function of ruthenium-based gate electrodes"
Thin Solid Films
,
515(4),
1294-1298,
2006.12.
https://doi.org/10.1016/j.tsf.2006.03.026.
69
H.N. Alshareef, M. Quevedo-Lopez, H.C.Wen, H.R. Harris, P.Kirsch, P. Majhi, B. H. Lee, R. Jammy, D.J.Lichtenwalner, J.S.Jur, A.I.Kingon,
"Work function engineering using lanthanide oxide interfacial layers"
Appl. Phys. Lett.
,
89(23),
232103,
2006.12.04.
https://doi.org/10.1063/1.2396918.
68
H.-C. Wen, H. R. Harris, C.D. Young, H.Luan, H.N. Alshareef, K. Choi, D.-L. Kwong, P. Majhi, G. Bersuker, and B. H. Lee,
"On Oxygen Deficiency and Fast Transient Charge-Trapping Effects in High-k Dielectrics"
IEEE Elec. Dev. Lett.
,
27(12),
984-987,
2006.11.30.
10.1109/LED.2006.886711.
67
G. Bersuker, C. S. Park, J. Barnett, P.S. Lysaght, P. D. Kirsch, C.D. Young, R. Choi, B. H. Lee, B. Foran, K. van Benthem, S. J. Pennycook, P. M. Lenahan and J. T. Ryan,
"The effect of interfacial layer properties on the performance of Hf-based gate stack devices"
J. Appl. Phys.
,
100(9),
094108,
2006.11.10.
https://doi.org/10.1063/1.2362905.
66
K.S.Chang, M. Green , J. Suehle , E. Vogel , H. Xiong , J. Hattrick-Simpers , I. Takeuchi , O. Famodu , K. Ohmori, P. Ahmet , T. Chikyow , P. Majhi , B. H. Lee and M. Gardner,
"Combinatorial Study of Ni-Ti-Pt Ternary Metal Gate Electrodes on HfO2 for the Advanced Gate Stack"
Appl. Phys. Lett.
,
89(14),
142108,
2006.10.04.
https://doi.org/10.1063/1.2357011.
65
D.Heh, R. Choi, C.D. Young, B. H. Lee and G.Bersuker,
"A novel bias temperature instability characterization methodology for high-k MOSFETs"
IEEE ESSDERC
,
287-290,
2007.02.12.
10.1109/ESSDER.2006.307719.
64
G. Thareja, S. Rhee, H.-C. Wen, R. Harris, P. Majhi, B. H. Lee and J.C. Lee,
"NMOS Compatible Work Function of TaN Metal Gate With Gadolinium Oxide Buffer Layer on Hf-Based Dielectrics"
IEEE Elec. Dev. Lett.
,
27(10),
802,
2006.09.25.
10.1109/LED.2006.882521.
63
J.L.Gavartin, D.Munz Ramo, A.L.Shluger, G.Bersuker, B. H. Lee,
"Negative oxygen vacancies in HfO2 as charge traps in high-k stacks"
Appl. Phys. Lett.
,
89(8),
082908,
2006.08.24.
https://doi.org/10.1063/1.2236466.
62
S. C. Song, M. M. Hussain, J. Barnett, B. S. Ju, and B. H. Lee,
"Integrating dual work function metal gates in CMOS"
Solid State Technology
,
49(8),
47-50,
2006.08.
61
B. H. Lee, P. Kirsch, H. Alshareef, P. Majhi, R. Choi, S. Song, H. H. Tseng and R. Jammy,
"Review of alternative gate stack technology research during the last decade"
Ceramist
,
9(4),
58-71,
2006.08.31.
60
H.K. Park, R. Choi, B. H. Lee, S.C. Song, M. Chang, C.D. Young , G. Bersuker, J.C. Lee and H. Hwang,
"Decoupling of cold carrier effects in hot carrier reliability assessment of HfO2 gated nMOSFETs"
IEEE Elec. Dev. Lett.
,
27(8),
662,
2006.07.24.
10.1109/LED.2006.878041.
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