Simultaneous measurement of six layers in a silicon on insulator film stack using spectrophotometry and beam profile reflectometry
Journal
Journal of Applied Physics
Vol
81 (8)
Page
3570
Author
J. M. Leng, J. J. Sidorowich, Y. D. Yoon, J. Opsal, B. H. Lee
Year
1997
Date
1997.04.15
doi
https://doi.org/10.1063/1.364994
File
1997_JAP_J.M.Leng 1.pdf (553.9K) 0회 다운로드 DATE : 2021-04-01 14:46:59