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    • Enhanced surface preparation technique for the Si/high-k interface
    Journal
    Solid state pheonomena
    Vol
    103-104
    Page
    11-14
    Author
    J. Barnett, C.D. Young, N,Moumen, G.Bersuker, J.J.Peterson, G.A. Brown, B.H.Lee, H.R.Huff
    Year
    2005
    Date
    2005.04.01
    doi
    https://doi.org/10.4028/www.scientific.net/SSP.103-104.11
    File
    2005_SSP_J. Barnett.pdf (167.9K) 0회 다운로드 DATE : 2021-04-01 16:04:31