Probing stress effects in HfO2 gate stacks with time dependent measurements
Journal
Microelectronics and Reliability
Vol
45
Page
806-810
Author
C. D. Young, G. Bersuker, Y. Zhao, J. J. Peterson, J. Barnett, G. A. Brown, J. H. Sim, R. Choi, B. H. Lee and P. M. Zeitzoff
Year
2005
Date
2004.12.23
doi
https://doi.org/10.1016/j.microrel.2004.11.043
File
2005_MR_C.D.Young.pdf (365.8K) 0회 다운로드 DATE : 2021-04-01 16:16:42