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    • Modulation of the work function of silicon gate electrode using thin TaN interlayers
    Journal
    APPLIED PHYSICS LETTERS
    Vol
    87
    Page
    052109
    Author
    H.N. Alshareef, H.C. Wen, K. Choi, R. Harris, H. Luan, P. Lysaght, P. Majhi, M. El-Bouanani, V. Ukride, and B. H. Lee
    Year
    2005
    Date
    2005.07.27
    doi
    https://doi.org/10.1063/1.2006977
    File
    2005_APL_H.N.Alshareef.pdf (315.1K) 0회 다운로드 DATE : 2021-04-01 16:32:15