Physical comparison of HfO2 transistors with polycrystalline silicon and TiN electrodes
Journal
APPLIED PHYSICS LETTERS
Vol
87
Page
082903
Author
P. S. Lysaght, B. Foran, G. Bersuker, J. J. Peterson, C. D. Young, P. Majhi, B. H. Lee, and H. R. Huff
Year
2005
Date
2005.08.15
doi
https://doi.org/10.1063/1.2011827
File
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