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Growth mechanism of TiN film on dielectric films and the effects on the work function

Journal

Thin Solid Films

Vol

486

Page

141

Author

K. Choi, P. Lysaght, H. Alshareef, C. Huffman, H.-C. Wen, R. Harris, H. Luan,P.-Y. Hung, C. Sparks, M. Cruz, K. Matthews, P. Majhi, B. H. Lee

Year

2005

Date

2005.02.11

doi

https://doi.org/10.1016/j.tsf.2004.11.239

File

2005_TSF_K.Choi.pdf (312.1K) 0회 다운로드 DATE : 2021-04-01 16:41:36

Link

https://doi.org/10.1016/j.tsf.2004.11.239 223회 연결