Charge trapping and detrapping characteristics in hafnium silicate gate dielectric using an inversion pulse measurement technique
Journal
APPLIED PHYSICS LETTERS
Vol
87
Page
122901
Author
R. Choi, S. C. Song, C. D. Young, G. Bersuker, and B. H. Lee
Year
2005
Date
2005.09.16
doi
https://doi.org/10.1063/1.2043252
File
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