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    • Evaluation of tantalum silicon alloy system as gate electrodes
    Journal
    APPLIED PHYSICS LETTERS
    Vol
    87
    Page
    212110
    Author
    H. Luan, H. N. Alshareef, P. S. Lysaght, H. R. Harris, H. C. Wen, K. Choi, Y. Senzaki, P. Majhi and B. H. Lee
    Year
    2005
    Date
    2005.11.18
    doi
    https://doi.org/10.1063/1.2126132
    File
    2005_APL_H.Luan.pdf (302.8K) 0회 다운로드 DATE : 2021-04-01 16:48:49